Brief Induction: We can customize small vacuum coating machines including magnetron sputtering, arc coating machine, evaporation machine, PECVD machine, ALD atomic layer deposition machine and multi-function coating machines according to research institutes and enterprise lab.

Application: The machine is used for developing new process and new material in colleges, research institutes or enterprise lab. It can also used for small batch trial or sample making. The machine can coat optical film, conductive film, hard film, lubricating film, EMI, heat dissipation film, electrical film and insulation film.  

Features: we can make the machine as bell jar, box, continuous, rolling structure according to customers’ requirements. It can equip with magnetron sputtering cathode, arc power supply , E-gun evaporation source, laser coating source and PECVD electrode. Optional assisted coating system including baking, pulse bias, ion source, bombardment, RF or microwave discharge device.